The objective of the course is to teach five different unit operations that are relevant to the fabrication of semiconductor devices. The unit operations that will be covered are: Thermal Oxidation, Lithography, Deposition, Plasma Etching, and Surface Preparation (Cleaning and Wet Etching). Graduate students will be required to analyze the data at a greater depth, interpret the results and fit the data to mathematical models.
Course Units
2
Instructor(s)
- Zafer Mutlu
Typically Offered
Spring