Jump to navigation

The University of Arizona Wordmark Line Logo White
College of Engineering
Home
  • Home
  • Give Today
  • Contact Us

Search form

  • About
    • Welcome
    • Advisory Board
    • Contact Us
  • Undergrad Programs
    • Admissions
    • Degrees
    • Courses
    • Advising
    • Scholarships & Financial Aid
    • Research & Internships
    • Student Clubs & Organizations
    • ABET Accreditation
  • Grad Programs
    • Admissions
    • On-Campus Degrees
    • Online Degrees
    • Courses
    • Advising
    • Research Focus Areas
    • Funding
  • Research
    • Focus Areas
    • Centers
    • Inventions
  • Faculty & Staff
    • Faculty Directory
    • Staff Directory
    • Faculty Videos
    • Employee Resources
    • Open Positions
  • Alumni
    • Give Today
  • News & Events
    • ECE News Archive
    • Events
Faculty & Staff
Home / Faculty & Staff / Faculty / Dale Hetherington
  • dalehetherington@arizona.edu
    520.626.1120

    ECE 556F

    Full details at profiles.arizona.edu

Dale Hetherington

  • Professor of Practice for Electrical and Computer Engineering

Dale Hetherington is a professor of practice in the Department of Electrical and Computer Engineering, joining the university after a 25-year career at Sandia National Laboratories in Albuquerque, New Mexico. The move to Tucson is a return home for Hetherington, who earned his master’s and doctoral degrees in electrical engineering at the University of Arizona in 1989 and 1992, respectively.

At Sandia National Laboratories, Hetherington worked as a fabrication manager, researching and developing semiconductor devices for national security and energy applications. He has also served as a guest lecturer at MIT and IMEC, and an adjunct faculty member at the University of New Mexico.

He has authored or co-authored more than 50 journal and conference articles and holds five granted patents.

Degrees

  • PhD: electrical engineering with optics minor, University of Arizona, 1992
  • MS: electrical engineering, University of Arizona, 1989
  • BS: mining engineering, West Virginia University, 1978

Teaching Interests

Electronic circuits, embedded microcontrollers, solid-state devices, semiconductor processing and statistical process control.

Textbooks/Most Significant Publications

Boning, D. and D. Hetherington. "Patterned Wafer Effects." Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science 69), pp. 284-349. M.R. Oliver, editor. Springer-Verlag, 2004.

  • FACULTY & STAFF
  • Faculty Directory
  • Staff Directory
  • Faculty Videos
  • Employee Resources
  • Open Positions
  • Cadence University Program Member
  • Employee Resources
The University of Arizona
Department of Electrical & Computer Engineering
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
520.621.6193

Facebook YouTube LinkedIn


University Privacy Statement

© 2023 The Arizona Board of Regents on behalf of The University of Arizona.