Professor of Practice for Electrical and Computer Engineering
Dale Hetherington is a professor of practice in the Department of Electrical and Computer Engineering, joining the university after a 25-year career at Sandia National Laboratories in Albuquerque, New Mexico. The move to Tucson is a return home for Hetherington, who earned his master’s and doctoral degrees in electrical engineering at the University of Arizona in 1989 and 1992, respectively.
At Sandia National Laboratories, Hetherington worked as a fabrication manager, researching and developing semiconductor devices for national security and energy applications. He has also served as a guest lecturer at MIT and IMEC, and an adjunct faculty member at the University of New Mexico.
He has authored or co-authored more than 50 journal and conference articles and holds five granted patents.
- PhD: electrical engineering with optics minor, University of Arizona, 1992
- MS: electrical engineering, University of Arizona, 1989
- BS: mining engineering, West Virginia University, 1978
Electronic circuits, embedded microcontrollers, solid-state devices, semiconductor processing and statistical process control.
Textbooks/Most Significant Publications
Boning, D. and D. Hetherington. "Patterned Wafer Effects." Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science 69), pp. 284-349. M.R. Oliver, editor. Springer-Verlag, 2004.